发明名称 Method for determining refractive index distribution
摘要 The present invention provides a method and system for determining three-dimensional refractive gradient index distribution. The method and system of the present invention determine inhomogeneity data and calculate index of refraction changes in three-dimensions (3D). The method and system provide 3D modeling of an optical object or system that determines the three-dimensional distribution of the refractive index in the object. In one embodiment, the optical object is a blank. In different embodiments, the optical system is more than one blank. In alternative embodiments, the optical system can be a projection optics system that can include optical components such as lenses, filters, plates, and prisms. The present invention also provides a method for selecting a plurality of preferred optical elements to assemble a composite optical system with predetermined parameters.
申请公布号 US6741362(B2) 申请公布日期 2004.05.25
申请号 US20020138714 申请日期 2002.05.06
申请人 ASML HOLDING N.V. 发明人 SMIRNOV STANISLAV;OSKOTSKY MARK L.;SAKIN LEV;MARTIN JOHN D.
分类号 G01J9/02;G01M11/00;G01M11/02;G01N21/41;G01N21/45;(IPC1-7):G01N21/41;G01J4/00;G01J5/52;G01B9/02;G01B11/02 主分类号 G01J9/02
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