Surgical tool with integrated pressure and flow sensors

摘要

A surgical tool with a rigid body including a needle portion for entering tissue includes a fluid flow channel formed therethrough. A sensor is integrally formed on the tool to detect changing conditions (pressure and/or flow) in the channel. The sensor signal may be used to provide feedback control of pumping of fluid through the channel. The tool may be a micromachined silicon tool with the sensor integrally formed thereon from a silicon nitrate membrane and polysilicon resistors. The tool may be an ultrasonically activated cutting tool, which may be bonded to a package at a node thereof.