发明名称 |
Polishing pads and methods relating thereto |
摘要 |
Polishing pads are provided having a polishing surface formed from a material. The polishing surface has a topography produced by a thermoforming process. The topography consists of large and small features that facilitate the flow of polishing fluid and facilitate smoothing and planarizing.
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申请公布号 |
US6739962(B2) |
申请公布日期 |
2004.05.25 |
申请号 |
US20020137056 |
申请日期 |
2002.05.01 |
申请人 |
RODEL HOLDINGS, INC. |
发明人 |
ROBERTS JOHN V. H.;JAMES DAVID B.;COOK LEE MELBOURNE;JENKINS CHARLES W. |
分类号 |
B24B37/04;B24B41/047;B24D3/26;B24D3/28;B24D13/12;B24D13/14;(IPC1-7):B24B1/00 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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