发明名称 SEMICONDUCTOR DEVICE WITH TRENCH ISOLATION LAYER FOR SURROUNDING BOTTOM OF JUNCTION REGION AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A semiconductor device and a method for manufacturing the same are provided to reduce junction capacitance between a junction region and a well by surrounding the bottom of the junction region using an L-shaped isolation layer. CONSTITUTION: A first well(11) is formed on a substrate(10). An L-shaped isolation layer(12) of a trench structure is formed in the first well of an isolation region. A second well is filled in the trench of the L-shaped isolation layer. A gate insulating layer(16) and a gate electrode(18) are formed on the substrate of an active region. A shallow junction region(22) is formed in the substrate and surrounded by the L-shaped isolation layer, so that the junction area between the junction region and the first well is reduced.
申请公布号 KR100434715(B1) 申请公布日期 2004.05.25
申请号 KR19970076747 申请日期 1997.12.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SONG, TAEK GEUN
分类号 H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L29/78
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