| 摘要 |
PURPOSE: An apparatus for accommodating substrates of a liquid crystal display and a method of correcting a motion of a robot arm using the apparatus are provided to accurately measure the performance of the robot arm used to transfer the substrates to appropriately manage the robot arm. CONSTITUTION: A cassette(400) includes the first, second and third sensing units(470a,470b,470c) for sensing the position of a robot arm. The first sensing unit senses drooping of the robot arm. The second sensing unit senses vibration of the robot arm. The third sensing unit senses straightness of the robot arm. The first sensing unit consists of four sensors located at front and back ends of both sidewalls of the cassette, and the second sensing unit consists of two sensors placed at the back ends of both sidewalls of the cassette. The third sensing unit includes four sensors located at the front and back ends of both sidewalls of the cassette. |
