发明名称 |
MICRO MIRROR STRUCTURE WITH FLAT REFLECTIVE COATING |
摘要 |
A micro mirror structure including a plurality of individually movable mirrors. Each mirror has a generally concave shape from a top perspective at a temperature of about 20 degrees Celsius and has a generally convex shape from a top perspective at a temperature of about 85 degrees Celsius. In one embodiment, the radius of curvature may be greater than about 500 mm at a temperature of about 20 degrees Celsius and may be less than about -600 mm at a temperature of about 85 degrees Celsius at a thickness of about 10 microns. In another embodiment, the invention is a micro mirror structure including a plurality of individually movable mirrors arranged in an array. Each mirror includes a substrate, a diffusion barrier layer located above the substrate, and a reflective layer located above the diffusion barrier layer. The diffusion barrier layer generally limits the diffusion of the top reflective layer through the diffusion barrier layer. |
申请公布号 |
WO2004029692(A3) |
申请公布日期 |
2004.05.21 |
申请号 |
WO2003US29076 |
申请日期 |
2003.09.16 |
申请人 |
ROSEMOUNT AEROSPACE INC. |
发明人 |
GUO, SHUWEN;HOFFMAN, ROSS |
分类号 |
B41J2/465;B81B1/00;G02B26/08 |
主分类号 |
B41J2/465 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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