| 摘要 |
Disclosed is a plasma treatment module-equipped sterilization apparatus which can easily sterilize thin, long lumens without the aid of boosters. The sterilization apparatus comprises a sterilization chamber (10) for receiving therein sterilization objects. Interconnected with the sterilization chamber (10), a sterilizing agent feeding line (20) is provided, comprising a hydrogen peroxide solution (21) acting as a sterilizing agent, an injection heater (22) for vaporizing the sterilizing agent (21) by heating, and a mass flow controller (23) for controlling the injection amount of the vaporized hydrogen peroxide. A vacuum pump (14), connected to the sterilization chamber (10) via an exhaust line (13), is installed for exhausting air from the sterilization chamber (10) to form a vacuum state. A plasma treatment module (31) is provided on the exhaust line (13) to treat the hydrogen peroxide vapor exhausted from the sterilization chamber with plasma. |
