| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device which acquires highly accurately surface shape information. SOLUTION: This surface inspection device for picking up an interference fringe image formed by an optical element for interference fringe formation and a measuring object, and for inspecting the surface shape of the measuring object based on the interference fringe image, is equipped with a moving means for moving the measuring object in the approximately vertical direction, in the state where a measuring surface of the measuring object is erected in the approximately vertical direction. COPYRIGHT: (C)2004,JPO |
