| 摘要 |
PROBLEM TO BE SOLVED: To maintain a large polarization until the process out in a solid electronic device having a Pb system perovskite ferroelectric film and its manufacturing method. SOLUTION: The stress in the Pb system perovskite ferroelectric film 2 constituting the solid electronic device is made a tensile stress or a compression stress of not higher than 27MPa. COPYRIGHT: (C)2004,JPO
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