发明名称 Cerium-based abrasive material and method for preparation thereof
摘要 A cerium-based abrasive and a production method of the cerium-based abrasive excellent in polishing properties of a high polishing speed and scarce formation of polishing scratches are provided by keeping the color of the abrasive in specified ranges or stably making fluorine be contained in the abrasive. For example, as such a cerium-based abrasive, examples include a cerium-based abrasive containing cerium oxide as a main component and having an L* value in a range not lower than 65 and or lower 90, an a* value in a range 0 or higher but 15 or lower, and a b* value in a range 10 or higher but 30 or lower in the case the color is expressed by an L*a*b* color system.
申请公布号 US2004093803(A1) 申请公布日期 2004.05.20
申请号 US20030467481 申请日期 2003.08.07
申请人 ITO TERUNORI;MOCHIZUKI NAOYOSHI;WATANABE HIROYUKI;UCHINO YOSHITSUGU;SHIMOGAWARA AKIRA 发明人 ITO TERUNORI;MOCHIZUKI NAOYOSHI;WATANABE HIROYUKI;UCHINO YOSHITSUGU;SHIMOGAWARA AKIRA
分类号 B24B37/00;C01F17/00;C09K3/14;H01L21/304;(IPC1-7):C09K3/14 主分类号 B24B37/00
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