| 摘要 |
PURPOSE: A semiconductor manufacturing apparatus for a laser marking is provided to be capable of stably fixing a driving part for preventing the generation of flat zone align miss for a long time. CONSTITUTION: A semiconductor manufacturing apparatus for a laser marking is provided with a laser irradiation part and a substrate profiler for aligning a semiconductor substrate. The substrate profiler includes a substrate support part for loading the semiconductor substrate, the first connection rod(111) vertically installed at the lower portion of the substrate support part, the second connection rod connected with the first connection rod to the longitudinal direction, a spin driving part connected with the second connection rod for rotating the substrate support part, and a coupling part(130) for coupling the connection rods each other.
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