发明名称 TESTING METHOD AND TESTING DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent a deformation defective in a bump terminal caused by contact failure of the bump terminal with a test electrode, and caused by irregular contact of the bump terminal with the test electrode. SOLUTION: In this testing method for testing semiconductor devices 16 arrayed with the plurality of bump terminals 13 on an terminal face, the plurality of semiconductor devices 16 with the terminal face directed upwards is stored in a semiconductor device storage tray 10, the bump terminals 13 of the semiconductor devices 16 stored in the semiconductor device storage tray 10 are position-regulated with respect to the tray 10, the storage tray 10 is moved to arrange the respective bump terminals 13 of the plurality of semiconductor devices 16 stored in the semiconductor device storage tray 10 into prescribed testing positions in order, and the semiconductor devices 16 are thereafter tested respectively. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004144499(A) 申请公布日期 2004.05.20
申请号 JP20020306751 申请日期 2002.10.22
申请人 KAWASAKI MICROELECTRONICS KK 发明人 MATSUMOTO CHIAKI
分类号 G01R31/26;G01R1/04;G01R31/01;(IPC1-7):G01R31/26 主分类号 G01R31/26
代理机构 代理人
主权项
地址