POSITIONING SUPPORT DEVICE

摘要

PROBLEM TO BE SOLVED: To maintain an object at a positioned location in a positioning support device using a ball transfer. SOLUTION: The positioning device is provided with: a movable part 2 having a stage 10 and a receiving plate 11 positioned with a vertical gap and integrally bonded at a central part by a shaft-like part 12; a support 3 surrounding the receiving plate and horizontally movably supporting the movable part within a predetermined range through ball transfers 22, 23; and a returning means 4 for returning the movable part to a predetermined position. A movement restriction means 5 for restricting movement of the movable part to the support is provided. The support is constituted by a lower wall part 19, an upper wall part 20 and a peripheral wall part 21. A surface opposed to a ball 25 of the ball transfer is formed to a horizontal surface and is contacted with the ball. The movement restriction means has a movement restriction member carrying out a pressing action from a lower wall part side toward a lower surface of the receiving plate based on a fluid pressure. The returning means is a coil spring 29. In the support, a suction discharge means is connected to an internal cavity. COPYRIGHT: (C)2004,JPO