| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing equipment for a platelike parts having a high washing capacity. SOLUTION: The washing equipment 100 is equipped with a rotary roller 2 for feeding platelike parts 1, a water film nozzle 4 for ejecting a water film 5 to the fed platelike parts 1 as a washing liquid and a cover 12a positioned so as to form a gap with respect to the platelike part 1 and covering the contact position 1p of the platelike part 1 where the ejected water film 5 collides with the platelike part 1. The width W1 of the cover 12a is not less than the width W2 of the platelike part 1. The cover 12a has a platelike shape and the distance between the cover 12a and the platelike part 1 is not more than 3 mm and the cover 12a may have a box-like shape having an internal space. COPYRIGHT: (C)2004,JPO
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