| 摘要 |
PROBLEM TO BE SOLVED: To suppress cracks generated at metal oxide film and the peeling-off of the metal oxide film from a substrate by these cracks. SOLUTION: This material for the metal oxide film formation is employed in a method to form the metal oxide film by coating thermal decomposition, and contains the saturated normal chain fatty acid salt of a metal constituting the metal oxide film, a crystallization inhibitor selected from normal chain or branched fatty acid having a substituent group and their salt, and an organic solvent. COPYRIGHT: (C)2004,JPO
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