SURFACE DEFECT INSPECTION METHOD AND SURFACE DEFECT INSPECTION APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for accurately inspecting moderate irregular defects on a surface of a subject by using a simple constitution and a simple adjustment method. SOLUTION: In the surface defect inspection method for inspecting the defects on the surface of the subject 1 as a cylindrical element or a column element having the smooth surface, a parallel light is obliquely radiated at an angle of 5-25°to an axis line in the axial direction of the subject 1, a reflection light 4a from the subject 1 passes through a lens for transmitting only a light parallel to an axis line of the lens and is received by an optoelectronic conversion sensor, a signal from the optoelectronic sensor is processed and the defects of the subject 1 are detected. The parallel light is radiated at an acute angle in the axial direction of the subject 1. The reflection light from the subject passes through a telecentric lens 13 and is received by the optoelectronic conversion sensor. The moderate irregular defects on the surface of the subject are captured as a contrast difference of the light and determined as the defects by processing the signal from the optoelectronic conversion sensor. COPYRIGHT: (C)2004,JPO