| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing device capable of transporting an object to be washed without trouble even when washing liquid is sprayed to the object to be washed at a high jetting pressure. SOLUTION: A washing device 21 for washing the surface 28a of a glass substrate 28 being transported in a predetermined transport direction with washing liquid 39 injected from a jet nozzle 33 is equipped with a high-pressure jet washing section 25. The jet nozzle 33 provided to a high-pressure jet washing section 25 is arranged on the surface 28a side of the glass substrate 28 in such a manner that the washing liquid 39 can be injected in the direction orthogonal to the transport direction 38 of the glass substrate 28. Since the injection direction of the washing liquid 39 is orthogonal to the transport direction of the glass substrate 28, the force of the jetting pressure of the washing liquid 39 to deter transport of the glass substrate 28 is decreased. COPYRIGHT: (C)2004,JPO
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