| 摘要 |
PROBLEM TO BE SOLVED: To improve bonding precision by bonding a glass substrate and a metal mask. SOLUTION: An alignment manufacturing method has: a first step S101 for overlapping a metal mask through the glass substrate with a prescribed gap; a second step S103 for obtaining a difference between positions of first and second marks based on image pickup information of the first and the second marks by a camera and judging whether the difference is within a prescribed range or not; a third step S105 for moving the glass substrate in directions of X and Y-axes based on the difference of the positions when the difference is out of the range; a fourth step S107 for bonding the metal mask and the glass substrate when the difference is within the range; a fifth step S109 for performing the second step S103; and a sixth step S111 dividing the metal mask and the glass substrate when the difference in the fifth step S109 is out of the range. COPYRIGHT: (C)2004,JPO |
