| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-machine and its method of manufacture which are used to uniform the strength of a supporting portion by making a beam supporting portion in the micro-machine suppress the effect of an installed substrate layer and uniform the height of the beam supporting portion. SOLUTION: The micro-machine and its method of manufacture are characterized in that a lower electrode 14 has a first opening pattern 14a which reaches an insulating film 21, and a supporting portion 17 for a beam 13 is installed on the insulating film 21 within the first opening pattern 14a, in the micro-machine provided with the lower electrode 14 formed on the insulating film 21, the beam 13 arranged with having a vacant space 15 in-between with the lower electrode 14, and an upper electrode 12 formed on the surface of the beam 13. COPYRIGHT: (C)2004,JPO
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