| 摘要 |
PROBLEM TO BE SOLVED: To prevent generation of sticking in a manufacturing step as much as possible in a method for manufacturing a capacity type acceleration sensor in which a groove is formed on a substrate by etching, and a movable part and a fixing part partitioned by this groove are formed. SOLUTION: A step for forming a conductive fixing member 80 for fixing the movable part and the fixing part by being laid on a movable electrode 20 and fixed electrodes 40, 50 while forming patterns of the movable parts 10-30 and the fixing parts 40-60 by forming the groove 70 is carried out. A step for releasing a part becoming the movable part of the patterns of the movable part and the fixing part fixed by the fixing member 80 from the substrate 100 (200) is carried out. Thereafter, a step for thermally cutting the fixing member 80 by energizing to the fixing member 80 is carried out. COPYRIGHT: (C)2004,JPO
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