Method for vacuum treatment of workpieces and vacuum treatment installation

摘要

A method for manufacturing workpieces treated in a vacuum includes providing first and second vacuum chambers having first and second vacuum pumps, respectively. A vacuum is generated in the first and second vacuum chambers using the second vacuum pump. The second vacuum pump is connected by valves between the first vacuum chamber through the first vacuum pump and the second vacuum chamber. The valves are operated to evacuate the second vacuum chamber, followed by processing the workpieces in the first vacuum chamber.