ABRASIVE SLURRY SUPPLY EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide abrasive slurry supply equipment designed to lower the manufacturing cost through a reduction in the usage of abrasives and able to facilitate work for manufacturing high-concentration abrasive slurry by decreasing the frequency of such manufacturing work.

SOLUTION: A using abrasive slurry is manufactured by supplying a high-concentration abrasive slurry having an abrasive concentration higher than that of the using abrasive slurry to be used actually in lapping, and a used diluted slurry produced by mixing the abrasives used in lapping with the cleaning liquid used in cleaning to a manufacturing storage tank 1. The equipment is provided with a liquid face displacement detection means 30 for detecting the vertical movement of the surface of the using abrasive slurry in the manufacturing storage tank 1, and the supply condition of the high-concentration abrasive slurry and the used diluted slurry to the manufacturing storage tank 1 is controlled in accordance with the detection results of the liquid surface displacement detection means 30.

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