| 摘要 |
PROBLEM TO BE SOLVED: To provide an image capture device which can measure the a high-definition surface shape of a specimen at high speed. SOLUTION: The image capture device has a stage for carrying a specimen, a light source for irradiating the specimen with UV rays, an optical microscope having a first optical system and second optical system for making the focusing states with the specimen the same and a focusing mechanism for adjusting the relative distance between the stage and the optical microscope. The first optical system has a focus detection means of an image contrast system, which is higher in the capture speed of the image than the second optical system and focuses the optical microscope by means of the focusing mechanism. The second optical system has an image capture section which is higher in the resolution than the first optical system and captures the shape information of the specimen. COPYRIGHT: (C)2004,JPO |
