| 摘要 |
PROBLEM TO BE SOLVED: To improve the quality of a film, and to improve film deposition efficiency. SOLUTION: The system comprises a cylindrical can along the circumferential face of which a film-like body to be treated runs and which consists of a cylindrical part 101 and flanges 102 and 103, and is provided with a cooling mechanism for cooling the running face of the body to be treated in the cylindrical part 101. The cylindrical part 101 and the flanges 102 and 103 are formed of a material whose thermal expansion coefficient is≤5.0×10<SP>-6</SP>/°C. COPYRIGHT: (C)2004,JPO
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