SEMICONDUCTOR MANUFACTURING APPARATUS FOR ION IMPLANTATION EQUIPMENT

摘要

PURPOSE: A semiconductor manufacturing apparatus for ion implantation equipment is provided to be capable of preventing wafer detection errors for improving the productivity. CONSTITUTION: A semiconductor manufacturing apparatus is provided with a spin disc(30), a plurality of wafer pads(31) installing at the peripheral portion of the spin disc, and a lifter assembly for loading and unloading a wafer. A sensor hole is vertically formed through the spin disc and the wafer pad and filled with insulation material. A conductive seam is vertically inserted in the center portion of the insulation material. The upper portion of the conductive seam is prolonged from the upper center portion of the insulation material to a predetermined height. The lower portion of the conductive seam is connected with a sensor(42c) of a wafer detecting part on the same vertical line.