RESIST PATTERN FORMING METHOD, MANUFACTURING METHOD OF SOLAR CELL USING THE SAME, AND RESIST PATTERN FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a resist pattern forming method capable of forming a resist pattern excellent in general-purpose properties on a substrate without damaging the substrate, a resist pattern forming apparatus using the same and a manufacturing method for a solar cell capable of stably manufacturing the solar cell in a high yield.

SOLUTION: The resist pattern forming method for forming a resist pattern 2 on a substrate 1 by coating the substrate 1 with a resist solution includes a process (i) for holding the substrate 1 almost vertically and a process (ii) which holds a nozzle for coating the substrate 1 with the resist solution almost horizontally, discharges the resist solution from the tip of the nozzle while bringing the tip of the nozzle into contact with the substrate 1 and moves at least one of the substrate 1 and the nozzle to form the predetermined resist pattern 2 on the substrate 1.

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