| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of stably producing high purity ultrapure water which solves a problem at a time of using a mixed bed type ion exchanger in a secondary ultrapure water producing device, particularly a problem caused by fine particles generated from the ion exchanger, and can rapidly start up the ion exchanger after replacing an ion exchange resin while taking into consideration a recent technical development. <P>SOLUTION: The method is the one that primary pure water is allowed to continuously pass through single beds of a cation exchange resin and an anion exchange resin in order in the secondary pure water producing device. <P>COPYRIGHT: (C)2004,JPO |
