| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor and an angular velocity sensor capable of simplifying wiring furthermore. SOLUTION: A weight body 250 comprising a conductive material is held in the suspended state in midair by flexible bridge parts 261, 262. Blocks 210, 220 comprising the conductive material are arranged right and left, and a capacitative element is formed between the blocks and the weight body 250. Each block is fixed in the sandwiched state between an upper substrate body 110 and a lower substrate body 310, but the weight body 250 is displaced with a prescribed degree of freedom. Electrodes E5, E6 are provided over and below the weight body 250, to thereby form a capacitative element. The displacement of the weight body 250 is detected based on a capacitance value of the capacitative element. Wiring relative to the block 210 is performed by a wiring terminal T1 penetrating the upper substrate body 110, and wiring relative to the block 220 is performed similarly at a prescribed spot. Wiring relative to the electrodes E5, E6 is performed by a similar method by using the blocks 225, 215, and wiring relative to the weight body 250 is performed through the conductive bridge part 262. COPYRIGHT: (C)2004,JPO
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