NON-CONTACT TYPE MEASUREMENT APPARATUS BY USING FREQUENCY RESPONSE DIVISION AND MEASURING METHOD THEREOF

摘要

PURPOSE: A non-contact type measurement apparatus by using frequency response division and a measuring method thereof are provided to reduce the number of driving sections by measuring a surface level and vibrating a cantilever using one driver. CONSTITUTION: A non-contact type measurement apparatus includes a base section(10). An X-Y scanner(11) is aligned on the X-Y scanner(11). A sample(12) is positioned on the X-Y scanner(11). A cantilever(15) having a sensing section(13) is formed on the sample(12). One end of the cantilever(15) is supported by a driving section(16) and the other end of the cantilever(15) is provided with a tip(14). A fixing member(17) is provided to support the driving section(16). A sensing section(13) detects amplitude of frequency according to a variation of a distance between the tip(14) and the sample(12).