| 摘要 |
The present invention aims to economically implement an ultra-compact semiconductor device having an identification number according to the efficient utilization of an electron-beam writing method. A memory for identifying a 128-bit identification number, which makes use of a transistor, is configured by each contact hole selectively defined by an electron-beam writing method. A plane long-side size of a semiconductor chip is set to 0.5 mm or less. The contact holes are defined simultaneously with contact holes for peripheral circuits. In addition, the plane long-side size of the semiconductor chip is set smaller than the thickness of a wafer prior to the start of its manufacture and set larger than the thickness of the post-thinning wafer. Otherwise, the same data as a barcode is further stored in the memory. Additionally, data obtained by enciphering the identification number is used to test or inspect the semiconductor chip.
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