| 摘要 |
<P>PROBLEM TO BE SOLVED: To increase accuracy in the assembly of an electron gun when assembling a cathode structure and a first control electrode. <P>SOLUTION: In an assembly method of the electron gun used for assembling the cathode structure 3 having a cathode 1 for discharging electrons and the first control electrode 6 for controlling electron discharge from the cathode 1, an image processing autofocus unit 12 is used to perform the focusing of an optical system to the electrode surface of the first control electrode 6 and that of the optical system to the electron discharge surface of the cathode 1 when the distance between the first control electrode 6 and the cathode 1 is set by allowing the first control electrode 6 to oppose the cathode 1, thus reducing variations in measurement. <P>COPYRIGHT: (C)2004,JPO |
