发明名称 ORGANIC MOLECULE DETECTION ELEMENT AND ORGANIC MOLECULE DETECTION APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an organic molecule detection element and an organic molecule detection apparatus for achieving improvement of working efficiency and miniaturization and simplification of the detection apparatus and improving detection sensitivity. SOLUTION: A pair of electrode regions 21, 22 is provide on a main face of a semiconductor substrate 11, and includes insulative films 12, 13 formed on the main face of the semiconductor substrate, a metal film 17 formed and covering a predetermined region 11a on the main face between the electrode regions through the insulative films and a fixing region 19 of an organic molecule disposed on a surface of the metal film. A current path is formed in the predetermined region 11a based on a charge of the fixed organic molecule when the organic molecule is fixed to the fixing region 19 at least. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004144630(A) 申请公布日期 2004.05.20
申请号 JP20020310507 申请日期 2002.10.25
申请人 NIKON CORP 发明人 YAGI TAKESHI
分类号 G01N27/60;G01N27/414;G01N33/483;G01N33/53;G01N33/566;G01N37/00;(IPC1-7):G01N27/60 主分类号 G01N27/60
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