| 摘要 |
PROBLEM TO BE SOLVED: To suppress the strain of a heat plate when the heat plate is fixed to a housing. SOLUTION: The hot plate 71 in a heating/cooling treating apparatus 43 is supported with a support ring 80 supported on a strut 81. The strut 81 is fixed to pedestals 82 and 83 fitted to inside the housing 70. The strut 81 and pedestals 82 and 83 are fixed with a bolt 85. A spring washer 84 is interposed between the strut 81 and the pedestals 82 and 83. In this constitution, even if the housing 70 is strained, the strain is absorbed by the spring washer 84. Consequently, when the hot plate 71 is fixed to the side of the housing 70, the hot plate 71 is deterred from being forcibly strained with strain on the side of the housing 70. COPYRIGHT: (C)2004,JPO
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