| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for stirring solution, which carry out uniform reaction on an array substrate and improve its reactive efficiency. SOLUTION: The apparatus for stirring the solution is made up so that a plate-like member disposed through sample solution is moved relatively to both the array substrate, where a prove is fixed thereto, and a table member where the array substrate is disposed thereon. The sample solution is stirred so that flow rates at all points on the array substrate are approximately equal to each other. Therefore, the sample solution is moved by using the plate-like member and can be supplied uniformly and efficiently on the surface of the array. As a result, the uniform reaction is carried out on the array substrate, and thereby obtaining the high reactive efficiency. COPYRIGHT: (C)2004,JPO
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