| 摘要 |
An object of this invention is to confirm the content of a defect in real time. A defect image, corresponding master pattern image, failure designation button, nondefective designation button, dust designation button, piece number, piece coordinates, and the type of defect are displayed within a defect image region in an inspection status display window. When the nondefective designation button or dust designation button is selected, the inspecting apparatus recognizes that a defect corresponding to the selected button is negligible, and changes the inspection result of this defect from the defect to a nondefective.
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