| 摘要 |
PROBLEM TO BE SOLVED: To provide a teaching device for shortening a time required for a teaching work in a height direction, for reducing the labor of an operator, and securing the teaching precision without depending on the operator. SOLUTION: This teaching device of a wafer carrying device is provided with a module inside which a plurality of pins for placing a wafer are arranged, a robot in which a wafer mounting part which can be inserted into the module is installed and a control part which controls the robot to teach the position of a wafer in a height direction at the time of carrying the wafer to the control part. This teaching device is provided with an internal board 1 simulating the shape of a wafer, an external board 2 for supporting the internal board 1 which freely rises and falls to a vertical direction, a projector 3 and a light receiver 4 mounted on the external board 2 and mirrors 5-1 and 5-2. In this case, the projector 3 and the light receiver 4 and the mirrors 5-1 and 5-2 are arranged so that when the internal board 1 rises and falls relatively to the external board 2 by the pins in the module, the internal board 1 can interfere with an optical path from the projector 3 to the light receiver 4. COPYRIGHT: (C)2004,JPO |
