METHOD FOR FABRICATING LIGHT-EMITTING DIODE USING NANOSIZE NITRIDE SEMICONDUCTOR MULTIPLE QUANTUM WELLS

摘要

Disclosed is a III-nitride compound semiconductor nanophase opto-electronic cell, comprising a silicon substrate (100), and an amorphous silicon nitride layer (base) (200) formed on the substrate and including III-nitride compound semiconductor nano grains (230) spontaneously formed therein. The nitride semiconductor nanophase opto-electronic cell and the fabrication method thereof according to the present invention are free from the problems of the conventional III-nitride compound semiconductor thin film growth on silicon substrates. Accordingly, a high-quality III-nitride compound semiconductor nanophase opto-electronic cell having no crystalline defect can be provided. Furthermore, the opto-electronic cell according to the present invention does not require a p-type GaN thin film so that there is no possibility of causing crack that is a problem in the conventional method of fabricating a III-nitride compound semiconductor opto-electronic cell using III-nitride thin films grown on silicon substrates. In addition, the number of processes of fabricating the cell is remarkably reduced to result in an economical and productive opto-electronic cell fabrication process.