发明名称 Method of producing a semiconductor-metal contact through a dielectric layer
摘要 What is described here is a method of electrically contacting a semiconductor layer (13) coated with at least one dielectric layer (12). The invention excels itself by the provisions that a metal layer (11) is applied on said dielectric layer (12) and that this metal layer (11) is temporarily locally heated in linear or dotted form by means of a source of radiation (9) in a controlled manner in such a way that a local molten mixture consisting exclusively of said metal layer (11), said dielectric layer (12) as well as said semiconductor layer (13) located directly underneath said dielectric layer (12) is formed, which, upon solidification, leads to an electrical contact between said semiconductor layer (13) and said metal layer (11).
申请公布号 US2004097062(A1) 申请公布日期 2004.05.20
申请号 US20030380836 申请日期 2003.07.30
申请人 PREU RALF;SCHNEIDERLOCHNER ERIC;GLUNZ STEFAN;LUDEMAN RALF 发明人 PREU RALF;SCHNEIDERLOCHNER ERIC;GLUNZ STEFAN;LUDEMAN RALF
分类号 H01L31/04;H01L21/00;H01L21/28;H01L21/324;H01L21/42;H01L31/0224;H01L31/18;(IPC1-7):H01L21/00 主分类号 H01L31/04
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