MICRO PATTERNING METHOD OF MULTILAYER THIN FILM AND PATTERNED MULTILAYER THIN FILM MANUFACTURED BY THE SAME

摘要

PURPOSE: A micro patterning method of a multilayer thin film and a patterned multilayer thin film manufactured by the same are provided to be capable of improving the quality of the patterned multilayer thin film and considerably reducing manufacturing time. CONSTITUTION: A predetermined substrate is loaded on a rotating part. At this time, positive or negative charges, or predetermined material having hydrogen bond exist(s) on the substrate. A plurality of micro paths are formed at the upper portion of the substrate by using a patterned elastic mold. The first spin coating process is carried out on the substrate by using the first material. The first multi-step cleaning process is performed on the substrate by using a cleaning solvent for forming the first thin film. The second spin coating process is carried out on the resultant structure by using the second material. The second multi-step cleaning process is performed on the resultant structure by using the cleaning solvent for forming the second thin film. The first and second thin film forming process are repeatedly carried out.