| 摘要 |
PURPOSE: A method for making an information recording medium for a probe type is provided to prevent the oxidation and the abrasion of a recording/playback process by forming a protecting film on a phase transition recording medium, and increase a recording/playback speed and prevent the abrasion by flattening the recording medium. CONSTITUTION: An electrode(101), the phase transition recording medium, and a conductive protecting film are sequentially deposited on a silicon wafer(100). A photo-resist film is formed on the conductive protecting film and a photo-resist pattern is patterned by a photo-lithography process. A conductive protecting film pattern(103a) and the phase transition recording medium pattern(102a) are formed by etching the conductive protecting film and the phase transition recording medium, and the photo-resist pattern is removed. The phase transition recording medium pattern is electrically insulated and an insulation film preventing the oxidation of the phase transition recording medium is deposited. The flattened insulation film(105a) is obtained by polishing/flattening the insulation file.
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