| 摘要 |
The invention provides devices and methods for removing and trapping large and/or dense abrasive particles from a polishing slurry. The polishing slurry is introduced into a container and allowed to stagnate, thereby causing large and/or dense particles to separate from the slurry under the influence of gravity. The container includes a cavity or plurality of cavities defined by an inner surface of the container into which the separated particles sink. To prevent the large and/or dense particles from becoming re-suspended into the slurry, the size and shape of the cavity is relatively deep and narrow with respect to the large and/or dense particles, thus providing a trapping effect. The cavities do not effectively trap the smaller particles.
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