| 摘要 |
PROBLEM TO BE SOLVED: To form an image with high quality by suppressing a shift of an orbit of an electron beam emitted from an electron-emitting element. SOLUTION: An electron beam device comprises a plate 11 having the electron-emitting element 12, a plate 17 arranged so as to face the plate 12, a grid 15 arranged between the both plates, having an opening through which the electron emitted from the electron-emitting element passes, and a spacer arranged between the both plates. A relation of D1<D2 is fulfilled on condition that a distance between a part between an opening located near a spacer of the grid and the spacer, and the plate 17 is D1, and the distance between a part between the opening located near the spacer of the grid and an opening located not near the spacer of the grid, and the plate 17 is D2. COPYRIGHT: (C)2004,JPO
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