发明名称 Photoresist composition for forming an insulation film, insulation film for organic electroluminescence element and method for itis formation
摘要 A photoresist composition comprising (A) a resin soluble in an alkali, (B) an ester of a quinonediazidesulfonic acid, (C) a thermosetting component and an organic solvent; an insulation film for organic EL devices which is formed by heating a resist film formed with the composition on a substrate in accordance with photolithography, has a sectional shape having upper edge portions having a round shape and the width increasing towards the bottom portion and has a thickness is in the range of 0.3 to 3 mum; and a process for producing the insulation film using the photoresist composition. The photoresist composition, the insulation film for organic EL devices and the process for producing the insulation film provide an insulation film having a sectional shape advantageous for an insulation film for organic EL devices since the width in the sectional shape of the film increases towards the bottom portion.
申请公布号 US2004096771(A1) 申请公布日期 2004.05.20
申请号 US20030381432 申请日期 2003.03.28
申请人 KASHIWAGI MOTOFUMI;MITAO NORIYUKI 发明人 KASHIWAGI MOTOFUMI;MITAO NORIYUKI
分类号 C08L61/06;G03F7/022;G03F7/40;H01L21/312;H01L27/32;H01L51/00;H01L51/40;(IPC1-7):G03F7/022;G03F7/20 主分类号 C08L61/06
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