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发明名称
A METHOD FOR REDUCTION OF SELECTED ION INTENSITIES IN CONFINED ION BEAMS
摘要
申请公布号
EP0871977(B1)
申请公布日期
2004.05.19
申请号
EP19970903735
申请日期
1997.01.03
申请人
BATTELLE MEMORIAL INSTITUTE
发明人
EIDEN, GREGORY, C.;BARINAGA, CHARLES, J.;KOPPENAAL, DAVID, W.
分类号
H01J49/10;G01N27/62;H01J27/02;H01J49/06;H01J49/14;H01J49/26;H01J49/42;(IPC1-7):H01J49/10
主分类号
H01J49/10
代理机构
代理人
主权项
地址
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