发明名称 QUALITY SURVEILLANCE OF A PRODUCTION PROCESS
摘要 <p>Method for monitoring a quality of a plurality of particularly different technical product types which are produced in a quasi-parallel manufacturing process, the manufacturing method including several sequentially arranged manufacturing stations, and whereby a course of a state variable for at least one of the manufacturing stations is determined point-by-point and displayed, the method including determining as a first type number a number of product types to be monitored, determining technical product parameter which is affected in the at least one manufacturing station, allocating a measuring arrangement to the manufacturing station for measuring the technical product parameter for at least one of the monitored product types, taking a random sample of a product type whose physical state is modified in the manufacturing station, the random sample being taken the first type number of product types, determining measured values for the determined technical product parameter of the random sample, calculating an individual average value from the measured values, storing the individual average value in a multi-dimensional average value attributed to the first type number, and repeating the taking through the storing for at least one further product type to supplement at least one further measured average value to the multi-dimensional average value.</p>
申请公布号 EP1145088(B1) 申请公布日期 2004.05.19
申请号 EP20000908934 申请日期 2000.01.17
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DERANGEWANDTEN FORSCHUNG E.V.;X-FAB SEMICONDUCTOR FOUNDRIES AG 发明人 OECHSNER, RICHARD;TSCHAFTARY, THOMAS;STRZYZEWSKI, PIOTR;PFITZNER, LOTHAR;SCHNEIDER, CLAUS;HENNIG, PETER
分类号 G05B19/418;G05B23/02;G06Q50/00;G07C3/14;(IPC1-7):G05B19/418 主分类号 G05B19/418
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