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发明名称
METHOD OF FABRICATING DISTRIBUTED REFLECTION MULTILAYER MIRROR
摘要
申请公布号
EP0978737(B1)
申请公布日期
2004.05.19
申请号
EP19990902867
申请日期
1999.02.09
申请人
SEIKO EPSON CORPORATION
发明人
SHIMODA, TATSUYA;KANEKO, TAKEO;MIYASHITA, SATORU
分类号
G02B5/08;H01S5/183;H01S5/42;(IPC1-7):G02B5/26;G02B5/28;H01L33/00;G02B5/20
主分类号
G02B5/08
代理机构
代理人
主权项
地址
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