发明名称 Process for producing encapsulated chips, involves separates chipping with contacts from a wafer and spray coating to encapsulate and applying wiring structure
摘要 A process for producing encapsulated chips comprises producing a wafer (100) with surface contacts (104), arranging it on a separating substrate (106) and dividing into chips (102) through grooves, spray coating an encapsulating material between contacts and grooves and forming a wiring structure through the encapsulation.
申请公布号 DE10250621(A1) 申请公布日期 2004.05.19
申请号 DE2002150621 申请日期 2002.10.30
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 BECKER, KARL-FRIEDRICH;BRAUN, TANJA;KOCH, MATHIAS;OSTMANN, ANDREAS;BOETTCHER, LARS;JUNG, ERIK
分类号 H01L21/56;H01L21/60;H01L21/68;H01L21/78;H01L23/31;H01L23/538;H01L25/10;(IPC1-7):H01L21/50 主分类号 H01L21/56
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