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发明名称
Predicting the lifetime of a filament in an ion source device
摘要
申请公布号
GB2395286(A)
申请公布日期
2004.05.19
申请号
GB20030026531
申请日期
2003.11.14
申请人
* NISSIN ELECTRIC CO LTD
发明人
KOJI * IWASAWA
分类号
H01J27/08;H01J27/02;H01J37/08;H01J37/24;(IPC1-7):H01J37/24
主分类号
H01J27/08
代理机构
代理人
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地址
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