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发明名称
DIFFERENTIAL-HITZEDRAHT-NÄHERUNGSMESSER
摘要
申请公布号
DE69817962(T2)
申请公布日期
2004.05.19
申请号
DE19986017962T
申请日期
1998.04.10
申请人
APPLIED MATERIALS, INC.
发明人
THOMAS, N.;MIRRO, JR.
分类号
G01B13/00;G01B13/02;G01F1/684;G01F1/69;G01P5/12;(IPC1-7):G01B13/12
主分类号
G01B13/00
代理机构
代理人
主权项
地址
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