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发明名称
Verfahren und Einrichtung zur Erzeugung von UV-Strahlung, insbesondere von EUV-Strahlung
摘要
申请公布号
DE10113064(B4)
申请公布日期
2004.05.19
申请号
DE2001113064
申请日期
2001.03.15
申请人
LZH LASERZENTRUM HANNOVER E.V.
发明人
CHICHKOV, BORIS N.;EGBERT, ANDRE
分类号
H05G2/00;(IPC1-7):H05G2/00;H05H1/24;H05H1/46;H05H5/02;G03F7/20
主分类号
H05G2/00
代理机构
代理人
主权项
地址
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